نوع مقاله : مقاله علمی
نویسندگان
دانشکده مهندسی مکانیک، دانشگاه تربیت دبیر شهیدرجایی، تهران، ایران
چکیده
کلیدواژهها
موضوعات
عنوان مقاله [English]
نویسندگان [English]
In this research, after examining the theoretical and experimental work done in the field of turbomolecular pumps, the simulation of the behavior of molecules in the free molecular flow between the stages of the turbomolecular pump, considering the effect of returning molecules from other stages, will be done. This simulation was done in the cylindrical coordinate system, using the test-particle Monte Carlo method and considering the real and three-dimensional geometry of the blade. Then the present work is validated and compared with experimental results and previous works. In the following, to investigate the effect of the blade angle in the middle and final stages of the turbomolecular pump, considering that three angles of 20, 15 and 10 degrees are mainly used in these stages, four different combinations of the aforementioned angles are presented for a five-stage turbomolecular pump. Finally, after examining the four combinations presented, it can be found that, for the middle and final stages of the turbomolecular pump, it should be done from different angles, emphasizing the 15 degree angle compared to the 20 and 10 degree angles and using less than the 10 degree angle in order to achieve the maximum comperation ratio and maximum flow rate.
کلیدواژهها [English]
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