بررسی عددی زاویه پره در طبقات میانی و پایانی یک پمپ توربومولکولار پنج طبقه با درنظرگرفتن اثر مولکول‌‌های بازگشتی از سایر طبقات به روش ذره نمونه مونت‌‌کارلو

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